By Robert A. Dorey
The MEMS (Micro Electro-Mechanical structures) marketplace back to progress in 2010. the entire MEMS marketplace is worthy approximately $6.5 billion, up greater than eleven percentage from final 12 months and approximately as excessive as its old top in 2007. MEMS units are used throughout sectors as different as car, aerospace, scientific, business technique regulate, instrumentation and telecommunications – forming the nerve middle of goods together with airbag crash sensors, strain sensors, biosensors and ink jet printer heads. a part of the MEMS cluster in the Micro & Nano applied sciences Series, this booklet covers the fabrication strategies and functions of thick movie piezoelectric micro electromechanical structures (MEMS). It comprises examples of purposes the place the piezoelectric thick movies were used, illustrating how the fabrication procedure pertains to the homes and function of the ensuing machine. different issues contain: top-down and bottom-up fabrication of thick movie MEMS, integration of thick movies with different fabrics, influence of microstructure on homes, gadget functionality, etc.
- Provides certain advice at the fabrication concepts and functions of thick movie MEMS, for engineers and R&D groups
- Written by way of a unmarried writer, this e-book presents a transparent, coherently written advisor to this significant rising technology
- Covers fabrics, fabrication and functions in a single book
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Ceramic Thick Films for MEMS and Microdevices (Micro and Nano Technologies) by Robert A. Dorey