Characterization in Silicon Processing (Materials by Yale E. Strausser PDF

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By Yale E. Strausser

ISBN-10: 1606501097

ISBN-13: 9781606501092

With a spotlight at the use of fabrics characterization options for silicon-based semiconductors, this quantity within the fabrics Characterization sequence specializes in the method move of silicon wafer manufacture the place fabrics homes, processing and linked difficulties are dropped at the fore. The booklet is equipped via the kinds of fabrics regularly linked to built-in silicon semiconductor circuits and the common procedures concerned for every such fabric, together with deposition, thermal remedy, and lithography. Readers will locate positive factors comparable to: -- the fundamental tactics of Silicon Epitaxial development -- insurance of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors -- Concise summaries of significant characterization applied sciences for silicon and similar semiconductor fabrics, together with Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation research and Raman Spectroscopy

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Characterization in Silicon Processing (Materials Characterization) by Yale E. Strausser

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